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Nanofabrication: the unsung hero in enabling advances in nanophotonics by Chengfeng Pan, Shutao Zhang, Farsari Maria, Oh Sang Hyun, Yang Joel K. W.
Published 2023-04-01
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High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography by Yoo, Daehan, Martin-Moreno, Luis, Mohr, Daniel A., Carretero-Palacios, Sol, Shaver, Jonah, Ebbesen, Thomas W., Oh, Sang-Hyun, Nguyen, Ngoc Cuong, Peraire, Jaime
Published 2016
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