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    Suppression of stacking-fault expansion in 4H-SiC PiN diodes using proton implantation to solve bipolar degradation

    Suppression of stacking-fault expansion in 4H-SiC PiN diodes using proton implantation to solve bipolar degradation by Masashi Kato, Ohga Watanabe, Toshiki Mii, Hitoshi Sakane, Shunta Harada

    Published 2022-11-01
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