Investigation of wet etching technique for selective patterning of ferroelectric zirconium-doped hafnium oxide thin films for high-frequency electronic applications by Livia Alexandra Dinu, Cosmin Romanitan, Martino Aldrigo, Catalin Parvulescu, Florin Nastase, Silviu Vulpe, Raluca Gavrila, Pericle Varasteanu, Andreea Bianca Serban, Rihem Noumi, Olga M. Ishchenko

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