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    Wafer level silicon mould fabrication and imprinting of high density microstructures

    Wafer level silicon mould fabrication and imprinting of high density microstructures by Wong, T. I., Ong, H. Y., Lu, H. J., Tse, M. S., Quan, C. G., Ng, S. H., Zhou, X.

    Published 2013
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    Journal Article

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