Showing 1 - 2 results of 2 for search 'Oskari Leiviskä', query time: 0.02s Refine Results
  1. 1
    Atomic Layer Deposition of Titanium Oxide-Based Films for Semiconductor Applications—Effects of Precursor and Operating Conditions

    Atomic Layer Deposition of Titanium Oxide-Based Films for Semiconductor Applications—Effects of Precursor and Operating Conditions by Vladyslav Matkivskyi, Oskari Leiviskä, Sigurd Wenner, Hanchen Liu, Ville Vähänissi, Hele Savin, Marisa Di Sabatino, Gabriella Tranell

    Published 2023-08-01
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  2. 2
    Surface Passivation of Germanium with ALD Al<sub>2</sub>O<sub>3</sub>: Impact of Composition and Crystallinity of GeO<sub>x</sub> Interlayer

    Surface Passivation of Germanium with ALD Al<sub>2</sub>O<sub>3</sub>: Impact of Composition and Crystallinity of GeO<sub>x</sub> Interlayer by Joonas Isometsä, Zahra Jahanshah Rad, Tsun H. Fung, Hanchen Liu, Juha-Pekka Lehtiö, Toni P. Pasanen, Oskari Leiviskä, Mikko Miettinen, Pekka Laukkanen, Kalevi Kokko, Hele Savin, Ville Vähänissi

    Published 2023-04-01
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