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Contribution of Ribbon-Structured SiO<sub>2</sub> Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators by Mohammed Moutaouekkil, Jérémy Streque, Othmane Marbouh, El Houssaine El Boudouti, Omar Elmazria, Philippe Pernod, Olivier Bou Matar, Abdelkrim Talbi
Published 2023-07-01
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