Integrating Philips' extreme UV source in the alpha-tools by Pankert, J, Apetz, R, Bergmann, K, Derra, G, Janssen, M, Jonkers, J, Klein, J, Krucken, T, List, A, Loeken, M, Metzmacher, C, Neff, W, Probst, S, Prummer, R, Rosier, O, Seiwert, S, Siemons, G, Vaudrevange, D, Wagemann, D, Weber, A, Zink, P, Zitzen, O