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Park, Tae Hong, 1973-
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Park, Tae Hong, 1973-
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Park, Tae Hong, 1973-
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1
Framework for characterization of copper interconnect in damascene CMP processes
by
Park, Tae Hong, 1973
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Published 2009
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Characterization and modeling of pattern dependencies in copper interconnects for integrated circuits
by
Park, Tae Hong, 1973
-
Published 2005
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