Impact of atomic layer deposition temperature on electrical and optical properties of ZnO:Al films by Gerard Masmitjà, Pau Estarlich, Gema Lopez, Isidro Martín, Cristobal Voz, Marcel Placidi, Arnau Torrens, Edgardo Saucedo Silva, Pia Vasquez, Delfina Muñoz, Joaquim Puigdollers, Pablo Ortega

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