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    Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results

    Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results by Hogan, Thomas J., Taylor, Stephen, Pedder, Randall E., Cheung, Kerry, Velasquez-Heller, Luis Fernand, Akinwande, Akintunde Ibitayo

    Published 2012
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