Showing 1 - 2 results of 2 for search 'Peter J. Wang', query time: 0.03s Refine Results
  1. 1
    Machine Learning Assisted Classification of Aluminum Nitride Thin Film Stress via In-Situ Optical Emission Spectroscopy Data

    Machine Learning Assisted Classification of Aluminum Nitride Thin Film Stress via In-Situ Optical Emission Spectroscopy Data by Yu-Pu Yang, Te-Yun Lu, Hsiao-Han Lo, Wei-Lun Chen, Peter J. Wang, Walter Lai, Yiin-Kuen Fuh, Tomi T. Li

    Published 2021-08-01
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    Article
  2. 2
    Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis

    Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis by Wei-Yu Zhou, Hsuan-Fan Chen, Xue-Li Tseng, Hsiao-Han Lo, Peter J. Wang, Ming-Yu Jiang, Yiin-Kuen Fuh, Tomi T. Li

    Published 2023-04-01
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    Article

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