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    Enhancing Performance of a MEMS-Based Piezoresistive Pressure Sensor by Groove: Investigation of Groove Design Using Finite Element Method

    Enhancing Performance of a MEMS-Based Piezoresistive Pressure Sensor by Groove: Investigation of Groove Design Using Finite Element Method by Phongsakorn Thawornsathit, Ekachai Juntasaro, Hwanjit Rattanasonti, Putapon Pengpad, Karoon Saejok, Chana Leepattarapongpan, Ekalak Chaowicharat, Wutthinan Jeamsaksiri

    Published 2022-12-01
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