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Fabrication and Characterizations of PbZr<sub>x</sub>Ti<sub>1-x</sub>O<sub>3</sub> (PZT) Ultrasonic Sensing Chips by Ming-Ling Lee, Shih-Ming Chen, Jia-Jie Jhang, Lin-Sin Lu, Shu-Ting Yang, Pin-En Chiu, Yu-Sheng Tsai, Yewchung Sermon Wu, Chin-Chi Cheng, Hsiang Chen, Jung Han
Published 2022-01-01
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