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    A TSV-Structured Room Temperature p-Type TiO<sub>2</sub> Nitric Oxide Gas Sensor

    A TSV-Structured Room Temperature p-Type TiO<sub>2</sub> Nitric Oxide Gas Sensor by Yu-Ming Yeh, Shoou-Jinn Chang, Pin-Hsiang Wang, Ting-Jen Hsueh

    Published 2022-10-01
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