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    Investigation of 5-nm-Thick Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Ferroelectric FinFET Dimensions for Sub-60-mV/Decade Subthreshold Slope

    Investigation of 5-nm-Thick Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Ferroelectric FinFET Dimensions for Sub-60-mV/Decade Subthreshold Slope by Meng-Ju Tsai, Pin-Jui Chen, Dun-Bao Ruan, Fu-Ju Hou, Po-Yang Peng, Liu-Gu Chen, Yung-Chun Wu

    Published 2019-01-01
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