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Photonic integration in a commercial scaled bulk-CMOS process by Kaertner, Franz X., Orcutt, Jason Scott, Khilo, Anatol M., Popovic, M. A., Holzwarth, Charles W., Li, Hanqing, Sun, J., Moss, Benjamin Roy, Dahlem, Marcus Vinicius Sobral, Ippen, Erich P., Hoyt, Judy L., Stojanovic, Vladimir Marko, Smith, Henry Ignatius, Ram, Rajeev J.
Published 2010
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