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  1. 1
    An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process

    An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process by Qianhuang Chen, Tianyang Shao, Yan Xing

    Published 2020-04-01
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  2. 2
    Helium focused ion beam induced subsurface damage on Si and SiC substrates: experiments and generative deep neural network modeling via position-dependent input

    Helium focused ion beam induced subsurface damage on Si and SiC substrates: experiments and generative deep neural network modeling via position-dependent input by Qianhuang Chen, Miguel A. Gosalvez, Qi Li, Yan Xing

    Published 2023-05-01
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    Article

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