Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films by Rahman, Mohd Azam Abdul, Goh, Boon Tong, Chiu, Wee Siong, Haw, Choon Yian, Mahmood, Mohamad Rusop, Khiew, Poi Sim, Rahman, Saadah Abdul