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    Low temperature wafer-scale synthesis of hexagonal boron nitride by microwave assisted surface wave plasma chemical vapour deposition

    Low temperature wafer-scale synthesis of hexagonal boron nitride by microwave assisted surface wave plasma chemical vapour deposition by Rupesh Singh, Golap Kalita, Rakesh D. Mahyavanshi, Sudip Adhikari, Hideo Uchida, Masaki Tanemura, Masayoshi Umeno, Toshio Kawahara

    Published 2019-03-01
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