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Laser-Patterned Alumina Mask and Mask-Less Dry Etch of Si for Light Trapping with Photonic Crystal Structures by Jovan Maksimovic, Haoran Mu, Daniel Smith, Tomas Katkus, Mantas Vaičiulis, Ramūnas Aleksiejūnas, Gediminas Seniutinas, Soon Hock Ng, Saulius Juodkazis
Published 2023-02-01
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