Enhanced performance of nanoscale vertical MOSFET by oblique rotating implantation (ORI) and fillet local oxidation(FILOX+ORI)technology / by Ismail Saad, 1974-, author, Razak M. A Lee, author, Munawar Agus Riyadi, 1977-, author, Zul Atfyi Fauzan Mohammed Napiah, 1983-, author, Razali Ismail, 1960-, author