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Regina Soufli
Regina Soufli
Regina Soufli
is a Greek-American physicist and a staff scientist at
Lawrence Livermore National Laboratory
, in
Livermore, California
, where she works on the development and the characterization of materials and thin-film coatings for
extreme ultraviolet
(EUV) and
X-ray
applications. The results of her work is the heart of the reflective optics used in
EUV lithography
, the next-generation in semiconductor manufacturing technology, in satellites such as
NASA
's
Solar Dynamics Observatory
and NASA/NOAA's
GOES-16
to
GOES-19
, or on optics for
Free-electron laser
s such as the
Linac Coherent Light Source
at
SLAC National Accelerator Laboratory
.
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Regina Soufli
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1
Breakthroughs in Photonics 2013: X-Ray Optics
by
Regina Soufli
Published 2014-01-01
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2
Using Temporally Synthesized Laser Pulses to Enhance the Conversion Efficiency of Sn Plasmas for EUV Lithography
by
Liang Yin
,
Hanchen Wang
,
Brendan A. Reagan
,
Cory Baumgarten
,
Zhonghao Lyu
,
Regina Soufli
,
Eric Gullikson
,
Vyacheslav N. Shlyaptsev
,
Jorge J. Rocca
Published 2021-01-01
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Article
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