An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode by Ahmed Khaled, Ahmed M. Salman, Nawaf S. Aljehani, Ibrahim F. Alzahem, Ridha S. Almikhlafi, Radwan M. Noor, Yasser M. Seddiq, Majed S. Alghamdi, Mostafa Soliman, Mohamed A. E. Mahmoud

Get full text