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    Nanocolumnar TiN thin film growth by oblique angle sputter-deposition: Experiments vs. simulations

    Nanocolumnar TiN thin film growth by oblique angle sputter-deposition: Experiments vs. simulations by Boudjemaa Bouaouina, Cédric Mastail, Aurélien Besnard, Rubenson Mareus, Florin Nita, Anny Michel, Grégory Abadias

    Published 2018-12-01
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