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  1. 1
    Structural Design and Simulation of a Multi-Channel and Dual Working Condition Wafer Defect Inspection Prototype

    Structural Design and Simulation of a Multi-Channel and Dual Working Condition Wafer Defect Inspection Prototype by Ruizhe Ding, Haiyan Luo, Zhiwei Li, Zuoda Zhou, Dingjun Qu, Wei Xiong

    Published 2023-08-01
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    Article
  2. 2
    Wafer Eccentricity Deviation Measurement Method Based on Line-Scanning Chromatic Confocal 3D Profiler

    Wafer Eccentricity Deviation Measurement Method Based on Line-Scanning Chromatic Confocal 3D Profiler by Dingjun Qu, Zuoda Zhou, Zhiwei Li, Ruizhe Ding, Wei Jin, Haiyan Luo, Wei Xiong

    Published 2023-04-01
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    Article

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