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    Compact Ga<sub>2</sub>O<sub>3</sub> Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature

    Compact Ga<sub>2</sub>O<sub>3</sub> Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature by Yue Yang, Xiao-Ying Zhang, Chen Wang, Fang-Bin Ren, Run-Feng Zhu, Chia-Hsun Hsu, Wan-Yu Wu, Dong-Sing Wuu, Peng Gao, Yu-Jiao Ruan, Shui-Yang Lien, Wen-Zhang Zhu

    Published 2022-04-01
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