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    Fabrication of Silicon Nanowire Metal-Oxide-Semiconductor Capacitors with Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> Stacked Dielectric Films for the Application to Energy Storage Devices

    Fabrication of Silicon Nanowire Metal-Oxide-Semiconductor Capacitors with Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> Stacked Dielectric Films for the A... by Ryota Nezasa, Kazuhiro Gotoh, Shinya Kato, Satoru Miyamoto, Noritaka Usami, Yasuyoshi Kurokawa

    Published 2021-07-01
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