TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT by I. V. Dainiak, V. V. Jarski, S. E. Karpovich

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Mechatronic system of parallel kinematics on hybrid direct action drivers by S. E. Karpovich, I. V. Dainiak, V. V. Kuzniatsou

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SIMULATION OF SPATIAL KINEMATICS diplacement SYSTEM with INTERACTIVE vizualzition of results by S. E. Karpovich, V. V. Kuzniatsou, M. M. Forutan

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PRECISION MOTION SYSTEMS FOR EQUIPMENT OF ELECTRONIC TECHNICS MANUFACTURING by S. E. Karpovich, V. V. Jarski, I. V. Dainiak

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PRECISION MOTION SYSTEM FOR OPTO-MECHANICAL EQUIPMENT OF MICROELECTRONICS by I. V. Dainiak, S. E. Karpovich, N. I. Kekish, L. Goldyn

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MATHEMATICAL MODEL OF THE FORMING OF HIGH RESOLUTION DISCRETE GRID FOR MOTION SYSTEM BASED ON LINEAR STEPPING DRIVE by I. V. Dainiak, S. E. Karpovich, V. P. Oger, A. V. Bezlyudov, D. S. Titko

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