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    Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks

    Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks by Li, L., Zheng, J., Lu, M., Stein, A., Ruggiero, C. A., Salzman, J., Kalish, R., Bayn, Igal, Mouradian, Sara L., Goldstein, Jordan A., Schroder, Tim, Chen, Edward H., Gaathon, Ophir, Englund, Dirk Robert

    Published 2015
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