A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices by Abdullah Saleh Algamili, Mohd Haris Md. Khir, John Ojur Dennis, Abdelaziz Yousif Ahmed, Sami Sultan Alabsi, Saeed Salem Ba Hashwan, Mohammed M. Junaid

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A review of piezoelectric MEMS sensors and actuators for gas detection application by Saeed S. Ba Hashwan, Mohd Haris Md. Khir, Illani Mohd Nawi, Mohamad Radzi Ahmad, Mehwish Hanif, Furqan Zahoor, Y. Al-Douri, Abdullah Saleh Algamili, Usman Isyaku Bature, Sami Sultan Alabsi, Mohammed O. Ba Sabbea, Muhammad Junaid

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