Use of Optical Emission Spectroscopy Data for Fault Detection of Mass Flow Controller in Plasma Etch Equipment by Hyukjoon Kwon, Sang Jeen Hong

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Industrial Internet of Things for Condition Monitoring and Diagnosis of Dry Vacuum Pumps in Atomic Layer Deposition Equipment by Yongho Lee, Chanyoung Kim, Sang Jeen Hong

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On-Wafer Temperature Monitoring Sensor for Condition Monitoring of Repaired Electrostatic Chuck by Jae-Hwan Kim, Yoonsung Koo, Wansoo Song, Sang Jeen Hong

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Plasma Ion Bombardment Induced Heat Flux on the Wafer Surface in Inductively Coupled Plasma Reactive Ion Etch by Sung Il Cho, Hyun Keun Park, Surin An, Sang Jeen Hong

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Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment by Hyoeun Park, Jeong Eun Choi, Dohyun Kim, Sang Jeen Hong

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Fabrication of Planar Heating Chuck Using Nichrome Thin Film as Heating Element for PECVD Equipment by Dong-Hyeok Im, Tae-Woong Yoon, Woo-Sig Min, Sang-Jeen Hong

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Alleviating Class-Imbalance Data of Semiconductor Equipment Anomaly Detection Study by Da Hoon Seol, Jeong Eun Choi, Chan Young Kim, Sang Jeen Hong

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Probe card-Type multizone electrostatic chuck inspection system by Yoon Sung Koo, Jae Hwan Kim, Chan Su Han, Sang Jeen Hong

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Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data by Jeong Eun Choi, Da Hoon Seol, Chan Young Kim, Sang Jeen Hong

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Surface Analysis of TMCTS-Based SiOC(H) Low-<i>k</i> Dielectrics in Post-Etch Strip of ACL Hardmask by Min Kyu Park, Wan Soo Song, Min Ho Kim, Sang Jeen Hong

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Optimizing Binding Site Spacing in Fluidic Self-Assembly for Enhanced Microchip Integration Density by Myeongho Park, Bin Yoo, Myeonghwan Hong, Daeun Cho, Yunjin Jeong, Cheolheon Park, Jaemin Kim, Tae-Min Ha, Garam Kim, Sang Jeen Hong, Daewon Lee

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