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The effect of methane concentration and chamber pressure on nucleation and morphology of polyerystalline diamond - coated Si3N4 by using microwave plasma assisted CVD / by Esah Hamzah, author, Agung Purniawan, author, Mohd. Radzi Mohd. Toff, author, Scientific Conference of Electron Microscopy Society of Malaysia (15th : 2006 : Kuala Terengganu)
Published 2006