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Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel by Sebastian M.J. Beer, Diane Samelor, Alsayed Abdel Aal, Johannes Etzkorn, Detlef Rogalla, Asiya E. Turgambaeva, Jerome Esvan, Aleksander Kostka, Constantin Vahlas, Anjana Devi
Published 2021-07-01
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