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A Simple Fabrication Process based on Micro-Masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes by Liviu eNicu, Liviu eNicu, Thierry eLeichle, Thierry eLeichle, Seok eKim, Bernard eLegrand, Bernard eLegrand, Fabrice eMathieu, Fabrice eMathieu, Hohyun eKeum, Adhitya eBhaswara, Adhitya eBhaswara
Published 2016-03-01
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