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    Controlling the beam angle spread of carbon implantation for improvement of bin map defect in V-NAND flash memory

    Controlling the beam angle spread of carbon implantation for improvement of bin map defect in V-NAND flash memory by Gui-Fu Yang, Sung-Hwan Jang, SUNG-UK JANG, Tae-Hyun Lee, Da-Hye Kim, Jung-Ho Huh, Seok-Hyun Yoo

    Published 2023-07-01
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