Showing 1 - 3 results of 3 for search 'Seong Ju Wi', query time: 0.02s Refine Results
  1. 1
    Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography

    Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography by Seong Ju Wi, Yong Ju Jang, Haneul Kim, Kyeongjae Cho, Jinho Ahn

    Published 2022-03-01
    Get full text
    Article
  2. 2
    Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane

    Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane by Seong Ju Wi, Yong Ju Jang, Dong Gi Lee, Seon Yong Kim, Jinho Ahn

    Published 2022-12-01
    Get full text
    Article
  3. 3
    Study on ZrSi<sub>2</sub> as a Candidate Material for Extreme Ultraviolet Pellicles

    Study on ZrSi<sub>2</sub> as a Candidate Material for Extreme Ultraviolet Pellicles by Seong Ju Wi, Won Jin Kim, Haneul Kim, Dongmin Jeong, Dong Gi Lee, Jaehyuck Choi, Sang Jin Cho, Lan Yu, Jinho Ahn

    Published 2023-08-01
    Get full text
    Article

Search Tools: