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One-Stage Formation of Two-Dimensional Photonic Crystal and Spatially Ordered Arrays of Self-Assembled Ge(Si) Nanoislandson Pit-Patterned Silicon-On-Insulator Substrate by Alexey V. Novikov, Zhanna V. Smagina, Margarita V. Stepikhova, Vladimir A. Zinovyev, Sergey A. Rudin, Sergey A. Dyakov, Ekaterina E. Rodyakina, Alexey V. Nenashev, Sergey M. Sergeev, Artem V. Peretokin, Anatoly V. Dvurechenskii
Published 2021-04-01
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