Free-standing 100 nm period gratings produced by achromatic holographic lithography by Shah, Satyen N. (Satyen Navin)

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A white light interferometer for improved achromatic holographic lithography by Shah, Satyen N. (Satyen Navin)

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Nanostructures Technology, Research, and Applications by Smith, Henry I., Silverman, Scott E., Ferrera, Juan, Wong, Vincent V., Carter, James M., Hector, Scott D., Moon, Euclid E., Owen, Gabrielle M., Schattenburg, Mark L., Yang, Isabel Y., Burkhardt, Martin, Li, Huiying, Mondol, Mark K., Murphy, Edward, Everett, Patrick N., Fleming, Robert C., Jr., Savas, Timothy A., Shah, Satyen N., Yasaka, Anto, Jackson, Keith M., Antoniadis, Dimitri A., Gupta, Nitin, Melloch, Michael R., Hugunin, James J., Fonstad, Clifton G., Jr., Damask, Jay N., Aucoin, Richard J., Canizares, Claude R., Porter, Jeanne M., Donovan, Sean M., Ismail, Khalid, Kolodziejski, Leslie A., Thompson, Carl V.

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Nanostructures, Technology, Research, and Applications by Smith, Henry I., Silverman, Scott E., Ferrera, Juan, Carter, James M., Lim, Michael H. Y., Moon, Euclid E., Wong, Vincent V., Yang, Isabel Y., Burkhardt, Martin, Franke, Andrea E., Mondol, Mark K., Murphy, Edward, Everett, Patrick N., Fleming, Robert C., Jr., Savas, Timothy A., Schattenburg, Mark L., Shah, Satyen N., Thompson, Carl V., Yasaka, Anto, Jackson, Keith M., Antoniadis, Dimitri A., Meinhold, Mitchell W., Carter, David J., Sokolinski, Ilia, Melloch, Michael R., Orlando, Terry P., Pepin, Anne, Schweizer, Mark R., Berman, David B., Ashoori, Raymond C., Marley, Elisabeth A., Murphy, Thomas E., Kolodziejski, Leslie A., Damask, Jay N., Haus, Hermann A., Aucoin, Richard J., Canizares, Claude R., Porter, Jeanne M.

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Submicron and Nanometer Structures Technology and Research by Smith, Henry I., Aucoin, Richard J., Carter, James M., Chu, William, Fleming, Robert C., Jr., Ghanbari, Reza A., Gupta, Nitin, Hector, Scott D., Li, Huiying, Moel, Alberto M., Schattenburg, Mark L., Wong, Vincent V., Ferrera, Juan, Lim, Michael H. Y., Mondol, Mark K., Frankel, Robert, Shah, Satyen N., Antoniadis, Dimitri A., Chung, James E., Fang, Hao, Hu, Hang, Eugster, Cristopher C., Kumar, Arvind, Orlando, Terry P., Rooks, Michael J., Burkhardt, Martin, del Alamo, Jesús A., Chou, Michael T., Shayegan, M., Sang-hun, Song, Tsui, Daniel, Yee, Kenneth, Zhao, Yang, Choi, Woo-Young, Fonstad, Clifton G., Jr., Damask, Jay N., Haus, Hermann A., Kolodziejski, Leslie A., Chu, Jack, Graybeal, John M., Meyerson, Bernard S., Rittenhouse, George E., Lew, Julie C., Canizares, Claude R., Ismail, Khalid, Karam, Nasser

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Nanostructures Technology, Research, and Applications by Smith, Henry I., Silverman, Scott E., Ferrera, Juan, Carter, James M., Wong, Vincent V., Gupta, Nitin, Hector, Scott D., Owen, Gabrielle M., Schattenburg, Mark L., Yang, Isabel Y., Burkhardt, Martin, Li, Huiying, Mondol, Mark K., Sission, Robert D., Moon, Euclid E., Aucoin, Richard J., Shah, Satyen N., Yasaka, Anto, Antoniadis, Dimitri A., Chu, William, Hu, Hang, Rhee, Kee, Su, Lisa T-F., Carter, David J., Kumar, Arvind, Melloch, Michael R., Orlando, Terry P., del Alamo, Jesús, Eugster, Cristopher C., Hugunin, James J., Damask, Jay N., Haus, Hermann A., Kolodziejski, Leslie A., Choi, Woo-Young, Fonstad, Clifton G., Jr., Moolji, Akbar A., Lew, Julie C., Porter, Jeanne M., Canizares, Claude R., Fleming, Robert C., Jr., Donovan, Sean M., Ismail, Khalid, Thompson, Carl V.

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