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    Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia

    Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia by Hua-Wen Liu, Tai-Hong Chen, Chun-Hao Chang, Shao-Kai Lu, Yi-Cyuan Lin, Day-Shan Liu

    Published 2017-01-01
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