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    An Integrated Thermal Compensation System for MEMS Inertial Sensors

    An Integrated Thermal Compensation System for MEMS Inertial Sensors by Sheng-Ren Chiu, Li-Tao Teng, Jen-Wei Chao, Chung-Yang Sue, Chih-Hsiou Lin, Hong-Ren Chen, Yan-Kuin Su

    Published 2014-03-01
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