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Manipulating the processing window of directed self-assembly in contact hole shrinking with binary block copolymer/homopolymer blending by Zhiyong Wu, Jiacheng Luo, Luyang Li, Qingshu Dong, Xiaohui Zhang, Zili Li, Yadong Liu, Shengxiang Ji, Weihua Li, Yan Zhang, Shisheng Xiong
Published 2024-04-01
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