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Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure by Zhuofei Gan, Hongtao Feng, Liyang Chen, Siyi Min, Chuwei Liang, Menghong Xu, Zijie Jiang, Zhao Sun, Chuying Sun, Dehu Cui, Wen-Di Li
Published 2022-04-01
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High-fidelity and clean nanotransfer lithography using structure-embedded and electrostatic-adhesive carriers by Zhuofei Gan, Jingxuan Cai, Zhao Sun, Liyang Chen, Chuying Sun, Junyi Yu, Zeyu Liang, Siyi Min, Fei Han, Yu Liu, Xing Cheng, Shuhui Yu, Dehu Cui, Wen-Di Li
Published 2023-01-01
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