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    Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor

    Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor by Jaewoo Lee, Jong-Pil Im, Jeong-Hun Kim, Sol-Yee Lim, Seung-Eon Moon

    Published 2019-01-01
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