Ultrathin TaN Damascene Nanowire Structures on 300-mm Si Wafers for Quantum Applications by Ekta Bhatia, Jack Lombardi, Soumen Kar, Michael Senatore, Stephen Olson, Tuan Vo, Sandra Schujman, Jakub Nalaskowski, Hunter Frost, John Mucci, Brian Martinick, Pui Yee Hung, Ilyssa Wells, Thomas Murray, Corbet S. Johnson, Aleksandra Biedron, Vidya Kaushik, Dan Campbell, Matthew D. Lahaye, Satyavolu S. Papa Rao

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