Showing 1 - 3 results of 3 for search 'Stefan E. Schulz', query time: 0.02s Refine Results
  1. 1
    Process Development of Aluminum Electroplating from an Ionic Liquid on 150 mm Wafer Level

    Process Development of Aluminum Electroplating from an Ionic Liquid on 150 mm Wafer Level by Silvia Braun, Maik Wiemer, Stefan E. Schulz

    Published 2024-06-01
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  2. 2
    Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor

    Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor by Mathias Franz, Mahnaz Safian Jouzdani, Lysann Kaßner, Marcus Daniel, Frank Stahr, Stefan E. Schulz

    Published 2023-09-01
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  3. 3
    Millisecond flash lamp curing for porosity generation in thin films

    Millisecond flash lamp curing for porosity generation in thin films by Ahmed G. Attallah, Slawomir Prucnal, Maik Buttering, Eric Hirschmann, Nicole Koehler, Stefan E. Schulz, Andreas Wagner, Maciej O. Liedke

    Published 2023-05-01
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