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    Validation of the silicon nanoparticle production on the pilot plant scale via long-term gas-phase synthesis using a microwave plasma reactor

    Validation of the silicon nanoparticle production on the pilot plant scale via long-term gas-phase synthesis using a microwave plasma reactor by Frederik Kunze, Stefan Kuns, Tim Hülser, Hartmut Wiggers, Sophie M. Schnurre

    Published 2023-09-01
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