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    Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures

    Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures by F. Y. Kuo, C. Y. Lin, P. C. Chuang, C. L. Chien, Y. L. Yeh, Stella K. A. Wen

    Published 2017-01-01
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