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Characterization of amorphous carbon films from 5 nm to 200 nm on single-side polished a-plane sapphire substrates by spectroscopic ellipsometry by Ziqing Li, Ziqing Li, Ziqing Li, Changcai Cui, Changcai Cui, Xiaolong Zhou, Subiao Bian, Subiao Bian, Subiao Bian, Oriol Arteaga, Oriol Arteaga, Xipeng Xu, Xipeng Xu
Published 2022-10-01
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