Impurity diffusion in ion implanted AlN layers on sapphire substrates by thermal annealing by Okumura, Hironori, Watanabe, Yasuhiro, Shibata, Tomohiko, Yoshizawa, Kohei, Uedono, Akira, Tokunaga, Hiroki, Koseki, Shuuichi, Arimura, Tadanobu, Suihkonen, Sami, Palacios, Tomás

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