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    Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /

    Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / by Symposium S, "Microelectromechanical Systems--Materials and Devices IV" (2010 : Boston, Mass.), DelRio, Frank W., Materials Research Society

    Published 2011

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